Abstract: Compact, large-range, and high-resolution lateral displacement measurement systems are
crucial for both precision manufacturing and related fundamental research. However, developing an easily
integrable measurement system that simultaneously achieves hundred-picometer-level resolution and a
hundred-micrometer-level measurement range presents a significant challenge. In this study, we propose
and experimentally validate a high-resolution, easily integrable lateral displacement measurement
technique based on reflective phase-encoded metasurface. This technique utilizes the phase-encoding
characteristics of the metasurface to map the lateral displacement onto the polarization rotation angle of
the reflected light. According to Malus's law, the intensity of the light can be measured by a power meter,
thereby directly reading out the displacement information. And based on this core idea, we designed and
fabricated a reflective phase-encoded metasurface with an area of 510 μm × 510 μm, enabling lateral
displacement measurement with a range of 200 μm and a resolution of 100 pm. Additionally, all
components of the device are integrated on one end of the target platform, providing a practical solution
for compact, large-range, high-resolution displacement sensors.

Key words: reflective phase-encoded metasurface, lateral displacement measurement, high-resolution