J4 ›› 2016, Vol. 33 ›› Issue (3): 296-300.

• Laser Tech. and Devices • Previous Articles     Next Articles

Optimizing the Performance ofexcimer Laser by Modifying Active Medium Gas Partial Pressures

  

  • Received:2015-03-04 Revised:2015-04-30 Published:2016-05-28 Online:2016-05-27

Abstract: Dependence of KrF excimer laser output energy on gas partial pressures of Kr and F2 was investigated, respectively. The output energy was extremely sensitive to the partial pressure of F2 and quadratically depended on the partial pressure of Kr. Maximum output energy of 807mJ with an overall efficiency of 1.64% was achieved for the optimum gas mixture of F2:He:Kr:Ne=3.15:59.85:195:3050mbar.

Key words: buffer gas

CLC Number: