Temperature control system of excimer laser based on Smith prediction compensation

J4 ›› 2018, Vol. 35 ›› Issue (5): 533-538.

• Basic Optics • Previous Articles Next Articles

Temperature control system of excimer laser based on Smith prediction compensation

ZHU Chenglin1,2,3，HAN Xiaoquan1,2， FENG Zebin1,2， HU Mingqing4

1 Opto-Electronics Engineering Department, Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China; 2 Excimer Laser Engineering Technology Research Center of Beijing, Beijing 100094, China; 3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100190, China; 4 Panda Electronics Incorporated Company, Nanjing 210007, China

Received:2017-06-19 Revised:2017-09-16 Published:2018-09-28 Online:2018-09-29

Abstract

Abstract:

Aiming at the large time delay characteristics of excimer laser temperature control system, the model identification of excimer laser temperature control system is carried out using MATLAB, and a new Smith-PID prediction compound controller is designed. On this basis, two kinds of controllers are simulated and experimented respectively. Results show that compared with the conventional PID controllers, the overshoot of Smith-PID compound prediction controller is reduced by 41% and the adjustment time is reduced by 51%. The designed controller has the advantages of strong robustness, small overshoot and short adjusting time, which can provide a favorable temperature control environment for the operation of excimer lasers.

Key words: laser techniques; temperature control; Smith prediction compensation; excimer laser

CLC Number:

TP273

References

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Temperature control system of excimer laser based on Smith prediction compensation

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