Research progress of fiber coupled technology for side emission semiconductor laser

Abstract

Abstract: With the rapid development of semiconductor growth technology and packaging technology, the performance of high power and high brightness semiconductor lasers has been continuously improved, which plays an important role in industrial processing, biomedical, national defense, as well as pumping source of fiber lasers and solid-state lasers. In recent years, the power and beam quality of side-emitting semiconductors have been improved, which makes the output power coupled to optical fibers continuously improve. Fiber coupled single emitter has gradually improved from milliwatt output to tens of watts output, even hundreds of watts output through space, spectrum, space combining technology. In the field of stacked array or multi-linear array fiber coupled laser, the output has also been improved from tens of watts level to tens of kilowatts level. Starting from three kinds of semiconductor lasers including single emitter, linear array and stacked array, the development status and technology of semiconductor lasers are investigated and analyzed, and the various shaping, bunching and coupling technology of fiber-coupled semiconductor lasers are also summarized and prospected.

Key words: semiconductor Laser, beam shaping, fiber coupling, high power

CLC Number:

TN248.4

References

[1] Crump P, Patterson S, Wang J, et al. Diode laser bars deliver > 400 W peak CW power from 800 nm to 980 nm, enabling wide range of applications[C]. Technologies for Optical Countermeasures III, SPIE, 2006, 6397: 639706.
[2] Crump P, Wang J, Crum T, et al. > 360 W and > 70% efficient GaAs-based diode lasers[C]. High-Power Diode Laser Technology and Applications III, SPIE, 2005, 5711: 21-29.
[3] Kanskar M, Earles T, Goodnough T J, et al. 73% CW power conversion efficiency at 50 W from 970 nm diode laser bars[J]. Electronics Letters, 2005, 41(5): 245-247.
[4] Li Min, Zhang Yong, Peng Wencui, et al. Long-term frequency stabilization system of external cavity semiconductor laser based on precision wavelength meter[J]. Chinese Journal of Quantum Electronics (量子电子学报), 2017, 34(4): 432-435(in Chinese).
[5] Zhu Zhen, Xiao Chengfeng, Xia Wei, et al. Design and fabrication of high-power 640 nm read laser diode[J]. Laser and Optoelectronics Progress(激光与光电子学进展), 2018, 55:081403(in Chinese).
[6] Xie Shengwen, Yang Chengao, Huang Shushan, et al. Research progress of 2 μm GaSb-based high-power semiconductor laser[J] . Infrared and Laser Engineering(红外与激光工程), 2018, 47(5): 0503003(in Chinese).
[7] Zhao P F, Wang Z N, Yu H J, et al. 12 W continuous-wave green output from a 200-μm fiber-coupled diode laser based on TO-Can packaged emitters[J]. Applied Optics, 2018， 57(9): 2263-2267.
[8] Injeyan H, Goodno G D. High-Power Laser Handbook[M], New York：McGraw-Hill Companies, 2011: 122-123.
[9] Platz R, Eppich B, Rieprich J, et al. High duty cycle, highly efficient fiber coupled 940-nm pump module for high-energy solid-state lasers[J]. High Power Laser Science and Engineering, 2016, 4: e3(1-5).
[10] Wang Lijun, Peng Hangyu, Zhang Jun. Advance on high power laser coupling[J]. Chinese Optics(中国光学), 2015, 8(4):517-534(in Chinese).
[11] Pierer J, Lützelschwab M, Grossmann S, et al. Automated assembly processes of high power single emitter diode lasers for 100W in 105 μm / NA 0.15 fiber module[C]. High-Power Diode Laser Technology and Applications IX. 2011, San Francisco, California, USA, SPIE, 7819: 78190I(1-8).
[12] Kasai Y, Yamagata Y, Kaifuchi Y, et al. High-brightness and high-efficiency fiber-coupled module for fiber laser pump with advanced laser diode[C]. High-Power Diode Laser Technology XV. 2017. San Francisco, California, USA, 10086: 1008606(1-6).
[13] Qin W, Li J, Yao L, et al. Research on fiber coupling technology of kilowatt laser diode by single emitters[C]. The 2nd International Conference on Material Engineering and Advanced Manufacturing Technology. 2018, Beijing, China, EDP Sciences, 189: 11008(1-6).
[14] Treusch H-G, Harrison J, Morris B, et al. Compact high-brightness and high-power diode laser source for materials processing[C]. Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II. 2000, 3945:23-31.
[15] Schr?der D, Meusel J, Hennig P, et al. Increased power of broad area lasers (808nm / 980nm) and applicability to 10mm-bars with up to 1000 Watt QCW[C]. High-Power Diode Laser Technology and Applications V. 2007. SPIE, 6456: 64560N(1-10).
[16] Knapczyk M T, Jacob J H, Eppich H, et al. 70% efficient, near 1 kW, single 1-cm laser-diode bar at 20℃[C]. High-Power Diode Laser Technology and Applications IX. 2011. San Francisco, California, USA: SPIE, 7918: 79180F(1-6).
[17] Kanskar M, Chen Z, Dong W, et al. High power and high efficiency 1.8-kW pulsed diode laser bar[J]. Journal of Photonics for Energy, 2017. 7(1): 016003.
[18] Frevert C, Crump P, Bugge F, et al. Low-temperature optimized 940 nm diode laser bars with 1.98 kW peak power at 203 K[C]. 2015 Conference on Lasers and Electro-Optics (CLEO). 2015, SM3F.8.
[19] Huang Zhihua. Study of Beam Shaping and Fiber Coupling Technology of Multiple Diode Laser Bars（基于多巴条半导体激光器的光束整形和光纤耦合技术研究）[D]. Xi’an: Master Thesis of Xi’an Institute of Optics & Precision Mechanics, Chinese Academy of Science, 2014(in Chinese).
[20] K?nning T, K?hler B, Wolf P, et al. Optical components for tailoring beam properties of multi-kW diode lasers[C]// Components and Packaging for Laser Systems III, 2017, San Francisco, California, USA, SPIE, 10085:100850G(1-10).
[21] Treusch H-G, Du K, Baumann M, et al. Fiber-coupling technique for high-power diode laser arrays[C]. 1998. SPIE, 3267:98-106.
[22] Lu Yutian, Liu Liren, Jiang Jianzhong, et al. Beam shaping system for diode laser bar[P]: CN ZL99124019[P] (中国专利), 2000-5-17 (in Chinese).
[23] Shi Peng , Li Xiaoli, Zhang Guifen, et al. Micro-prism stack beam shaper for high power diode array[J], ACTA Optica Sinica(光学学报), 2000, 20(11):1545-1547(in Chinese).
[24] Wang Z J, Cheng A Z, Wang Y. Optical coupling system for a high-power diode pumped solide state laser: US6377410[P], 2002-04-23.
[25] Haag S, Sinhoff V, Müller T, et al. Engineering of automated assembly of beam-shaping optics[C]// Laser Resonators, Microresonators, and Beam Control XVI. 2014. San Francisco, California, United States: SPIE, 8960: 89601O(1-10).
[26] Wang Zhenguo, Duan Wentao, Zheng Jiangang, et al. End-pumped coupling system based on large-aperture laser diode array[J]. High Power Laser and Particle Beams(强激光与离子束), 2012, 24(7):1683-1687 (in Chinese).
[27] Duan Wentao, Jiang Dongbin, Jiang Xuejun, et al. High power laser diode arrays end-pumped efficient coupling system[J], Chinese Journal of Lasers(中国激光), 2009, 36(1)51-55.
[28] Wang Zhenguo, Jiang Xinying, Zheng Jinggang, et al. Coupling system for laser-diode-array end-pumped slab amplifiers[J], High Power Laser and Particle Beams(强激光与离子束), 2017, 29(9): 091002(1-6)(in Chinese).
[29] Yan Xiongwei, Wang Zhenguo, Jiang Xinying, et al. Analysis of laser diode array pump coupling system based on microlens array[J], Acta Physics Sinica(物理学报), 2018, 67(18):184201(1-9).(in Chinese)
[30] Albach D, Arzakantsyan M, Novo T, et al. Comparison of large size Yb3+:YAG ceramics and crystals[C]// The 7th international HEC-DPSSL workshop. 2012: Lake Tahoe, California.
[31] Gon?alvès T -N, Albach D, Vincent B, et al. 14 J / 2 Hz Yb3+:YAG diode pumped solid state laser chain[J]. Optics Express, 2013. 21(1): 855-866.
[32] Xingsheng Liu, Wei Zhao, Lingling Xiong, et al. Packaging of high power semiconductor Lasers, [M]. Springer New York Heidelberg Dordrecht London: Springer, 2015: 387-389.
[33] Ghasemi S H , Hantehzadeh M R, Sabbaghzadeh J, et al. Beam shaping design for coupling high power diode laser stack to fiber[J]. Applied Optics, 2011. 50(18): 2927-2930.
[34] Hao Mingming, Research on high power fiber coupling technology for diode laser arrays（大功率半导体激光短阵列合束及光纤耦合技术的研究）[D]. Changchun: Doctorial Dissertation of Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, 2012(in Chinese).
[35] Krause V, Ullmann C. Laser optics and a diode laser[P]. US:5986794, 1999-09-16.
[36] Yu H, Zhao X, Xu X, et al. Integrated beam shaping and polarization beam combining design for fiber-coupled semiconductor laser stacks system[J]. Applied Optics, 2017. 56(34): 9510-9514.
[37] Zhang Zhijun, Liu Yun, Liao Guoqing et al. The 2 kW semiconductor laser processing light[J], Chinese Journal of Luminescence(发光学报), 2013. 34(3): 334-339(in Chinese).
[38] Matthews D G, Kleine K, Krause V, et al. A 15-kW fiber-coupled diode laser for pumping applications[C]// High-Power Diode Laser Technology and Applications X. 2012. San Francisco, California, USA, SPIE, 5241:524103(1-6)
[39] Malchus J, Krause V, Matthews D G. A 25kW fiber-coupled diode laser for pumping applications[C]// High-power Diode Laser Technology & Applications XII. 2014, SPIE, 8965: 89650B(1-10).
[40] Malchus J, Krause V, Rehmann G, et al. A 40kW fiber-coupled diode laser for material processing and pumping applications[C]. High-Power Diode Laser Technology and Applications XIII. 2015. San Francisco, California, USA, SPIE, 9348: 934803(1-12).