Chinese Journal of Quantum Electronics ›› 2021, Vol. 38 ›› Issue (4): 428-435.doi: 10.3969/j.issn.1007-5461.2021.04.004

• Quantum Physics • Previous Articles     Next Articles

Low loss superconducting coplanar waveguide resonator based on aluminum film

ZHENG Yuzhen1, ZHU Bojie1, WU Biao1, HUANG Yongdan1, CHEN Jian1, HUANG Rong1, SUN Junyi1, JIA Haolin2, GU Jun2, XIONG Kanglin1,2∗, FENG Jiagui1,2∗, YANG Hui1,2   

  1. ( 1 Vacuum Interconnected Nanotech Workstation, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China; 2 Gusu Laboratory of Materials, Suzhou 215123, China )
  • Received:2021-03-01 Revised:2021-04-13 Published:2021-07-28 Online:2021-07-27

Abstract: To develop useful superconducting quantum systems, the quality of qubits needs to be improved furthermore. At present, defects in materials and their interfaces are important factors affecting the co- herence time of qubits. As an important part of superconducting quantum chip, microwave resonator can be used to characterize the quality of materials and the fabrication process of devices. Using molecularbeam epitaxy technology, aluminum is deposited on intrinsic silicon (111) substrate to prepare the λ/4 coplanar waveguide resonators. By the preparation of silicon substrate and the deposition of high quality aluminum films, the intrinsic quality factor of the resonator is improved to 106 at 20 mK with the probing power at near single-photon level.

Key words: quantum electronics, coplanar waveguide resonator, low loss, quality factor, single photon

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