量子电子学报 ›› 2022, Vol. 39 ›› Issue (3): 293-306.doi: 10.3969/j.issn.1007-5461.2022.03.001

• 光谱 •    下一篇

宽谱段 Czerny-Turner 光谱仪设计

李世文1;2, 郑小兵2, 翟文超2∗   

  1. ( 1 中国科学技术大学环境科学与光电技术学院, 安徽合肥230026; 2 中国科学院合肥物质科学研究院安徽光学精密机械研究所通用光学定标与表征技术重点实验室, 安徽合肥230031 )
  • 收稿日期:2020-09-14 修回日期:2020-10-20 出版日期:2022-05-28 发布日期:2022-05-28
  • 通讯作者: E-mail: wczhai@aiofm.ac.cn E-mail:wczhai@aiofm.ac.cn
  • 作者简介:李世文( 1996 - ), 女, 湖北襄阳人, 研究生, 主要从事光谱辐照度仪光学设计方面的研究。E-mail: lsw961223 @163.com
  • 基金资助:
    Supported by National Natural Science Foundation of China (国家自然科学基金, 41805019), National Key R & D Program of China (国家重点研发计划, 2018YFB0504602)

Design of Czerny-Turner spectrometer with wide band

LI Shiwen1;2, ZHENG Xiaobing2, ZHAI Wenchao2∗   

  1. ( 1 School of Environmental Science and Optoelectronic Technology, University of Science and Technology of China, Hefei 230026, China; 2 Key Laboratory of Optical Calibration and Characterization, Anhui Institute of Optical and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China )
  • Received:2020-09-14 Revised:2020-10-20 Published:2022-05-28 Online:2022-05-28

摘要: 为满足宽波段高光谱Czerny-Turner 结构光谱仪的要求, 基于像差理论, 一方面通过光栅产生的像散补 偿球面反射镜的像散, 另一方面通过柱面镜引入相反像散补偿剩余像散, 达到全波段消像散的要求, 从而提高 Czerny-Turner 结构光谱仪成像系统的分辨率。首先理论推导出光栅和柱面镜补偿像散的基础公式, 并基于此分 别设计出波段为900∼1700 nm 和1700∼2500 nm 全波段消像散的Czerny-Turner 光谱仪成像系统, 随后通过前置 光路将两部分组合, 从而实现波段范围在900∼2500 nm 的消像散Czerny-Turner 结构光谱仪成像系统。此光谱 仪系统全波段分辨率小于10 nm, 物方数值孔径0.07, 全波段点列图均方根半径小于4 m。ZEMAX 的优化分析 表明, 该光谱仪在全波段范围内不仅达到消像散要求, 而且具有较好的成像质量。

关键词: 光学工程, Czerny-Turner 结构, 消像散, 柱面透镜, 光谱仪

Abstract: In order to meet the requirements of wide-band hyperspectral Czerny-Turner spectrometer, based on the aberration theory, on the one hand, the astigmatism generated by the grating is used to compensate the astigmatism of the spherical mirror, and on the other hand, the opposite astigmatism is introduced through cylindrical mirror to compensate for the residual astigmatism, so as to achieve the full range elimination of astigmatism, and at last to improve the resolution of the Czerny-Turner structure spectrometer imaging system. Firstly, the basic formulas of grating and cylindrical mirror to compensate for astigmatism is deduced, and then based on this, the Czerny-Turner spectrometer imaging system with full-band astigmatism in the band of 900-1700 nm and 1700-2500 nm are designed respectively. Finally, the two parts are combined through the front optical path, thus realize the astigmatism Czerny-Turner structure spectrometer imaging system in the full range of 900-2500 nm. The full-band resolution of the spectrometer is less than 10 nm, the object-side numerical aperture is 0.07, and the full-band root mean square radius is less than 4 m. The optimization analysis of ZEMAX shows that the designed spectrometer not only meets the astigmatism elimination requirements in the whole band, but also has good imaging quality.

Key words: optical engineering, Czerny-Turner structure, astigmatism, cylindrical lens, spectrometer

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