深紫外飞秒脉冲准分子激光放大同步特性研究

doi:10.3969/j.issn.1007-5461.2024.02.010

量子电子学报 ›› 2024, Vol. 41 ›› Issue (2): 278-288.doi: 10.3969/j.issn.1007-5461.2024.02.010

深紫外飞秒脉冲准分子激光放大同步特性研究

范军 1,2, 杨礼昭 1,2, 游利兵 3,4*, 戎丹丹 1,2, 王宏伟 1,2, 寸超 1,2, 方晓东 1,2,3

( 1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 安徽省光子器件与材料重点实验室, 安徽合肥 230031; 2 中国科学技术大学, 安徽合肥 230026; 3 深圳技术大学新材料与新能源学院, 广东深圳 518118; 4 深圳盛方科技有限公司, 广东深圳 518173 )

收稿日期:2022-03-15 修回日期:2022-04-26 出版日期:2024-03-28 发布日期:2024-03-28
通讯作者: E-mail: youlibing@sztu.edu.cn E-mail:E-mail: youlibing@sztu.edu.cn
作者简介:范军 ( 1998 - ), 安徽阜阳人, 研究生, 主要从事深紫外激光准分子放大技术方面的研究。 E-mail: fj199903@mail.ustc.edu.cn
基金资助:
国家自然科学基金 (41627803), 安徽省重点研究和开发计划项目 (1804a0802219), 深圳市科技计划资助项目 (KQTD20170331115422184, JCYJ20210324120207021), 中国科学院核心关键技术攻关项目 (ZKYXG-2018-04), 广东省科技计划项目 (2021QN02Z552)

Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser

FAN Jun 1, 2, YANG Lizhao 1, 2, YOU Libing 3, 4*, RONG Dandan 1, 2, WANG Hongwei 1, 2, CUN Chao 1, 2, FANG Xiaodong 1, 2, 3

( 1 Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 College of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China; 4 Shenzhen Shengfang Technology Limited Company, Shenzhen 518173, China )

Received:2022-03-15 Revised:2022-04-26 Published:2024-03-28 Online:2024-03-28

摘要/Abstract

摘要： 为了获得大能量的深紫外超短脉冲, 将深紫外飞秒种子光通过ArF 准分子放大器进行放大。通过对种子光信号和准分子放大器的荧光信号进行测量, 在不同环境下, 针对种子光信号与放大器放电信号之间的延时对脉冲单程放大特性的影响进行了研究。研究结果表明, 放大系统实现了种子光与准分子放大器的低抖动精确同步, 空气和氮气环境下脉冲能量最高分别为197.2 μJ 和312.6 μJ, 且氮气环境下脉冲展宽较空气平均降低99.2 fs。相较于空气环境, 氮气环境可有效降低深紫外超短脉冲的能量衰减与脉冲展宽, 且同步抖动对放大特性影响较小。

关键词: 激光技术, 同步特性, 准分子放大, 深紫外飞秒激光

Abstract: In order to obtain deep ultraviolet (UV) ultrashort pulses with large energy, deep UV femtosecond seed light is amplified by an ArF excimer amplifier. By measuring the seed light signal and the fluorescence signal of the excimer amplifier, the effect of the delay between the seed light signal and the amplifier discharge signal on the single amplification characteristics of the pulse was investigated under different environments. The results show that the amplification system achieves precise synchronization of seed light and excimer amplifier with low jitter, the maximum pulse energy in air and nitrogen is 197.2 μJ and 312.6 μJ, respectively, and the pulse spreading in nitrogen environment is reduced by 99.2 fs on average compared with in air. It is proved that compared to air environment, nitrogen environment can effectively reduce the energy decay and pulse spreading of deep UV ultrashort pulses, and synchronous jitter has less influence on amplification characteristics.

Key words: laser techniques, synchronization characteristics, excimer amplification, deep ultraviolet
femtosecond laser

中图分类号:

TN248

范军 , 杨礼昭 , 游利兵 , 戎丹丹 , 王宏伟 , 寸超 , 方晓东 , . 深紫外飞秒脉冲准分子激光放大同步特性研究[J]. 量子电子学报, 2024, 41(2): 278-288.

FAN Jun , , YANG Lizhao , , YOU Libing , , RONG Dandan , , WANG Hongwei , , CUN Chao , , FANG Xiaodong , , . Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser[J]. Chinese Journal of Quantum Electronics, 2024, 41(2): 278-288.

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深紫外飞秒脉冲准分子激光放大同步特性研究

Synchronization characteristics of deep ultraviolet femtosecond pulse amplified by excimer laser

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