熔石英损伤特性原位测量方法研究

量子电子学报 ›› 2021, Vol. 38 ›› Issue (1): 94-98.

熔石英损伤特性原位测量方法研究

李文彩1, 马玉良2, 陈坚3

1 安徽建筑大学数理学院, 安徽合肥230601; 2 合肥利弗莫尔仪器科技有限公司, 安徽合肥230088; 3 合肥知常光电科技有限公司, 安徽合肥230031

收稿日期:2020-04-13 修回日期:2020-05-08 出版日期:2021-01-28 发布日期:2021-02-01
通讯作者: E-mail: jchen@zc-hightech.com E-mail:jchen@zc-hightech.com
作者简介:李文彩( 1989 - ), 女, 安徽宿州人, 博士, 讲师, 主要从事光学精密检测方面的研究。E-mail: wencai0816@sina.com
基金资助:
Supported by Key Program of Natural Science Research Project of Anhui Province of China (安徽省高校省级自然科学研究项目-重点项目, KJ2019A0788), PhD Start-up Project of Natural Science (校引进人才及博士启动基金项目-自然科学类, 2019QDZ06), Major R & D Projects of Key Technologies of Hefei (合肥市关键技术重大研发类项目, J2018G21)

In situ measurement of damage characteristics of fused quartz

LI Wencai1, MA Yuliang2, CHEN Jian3

1 School of Mathematics and Physics, Anhui Jianzhu University, Hefei 230601, China; 2 Livermore Instrument Technologies Ltd., Hefei 230088, China; 3 ZC Optoelectronic Technologies, Ltd., Hefei 230031, China

Received:2020-04-13 Revised:2020-05-08 Published:2021-01-28 Online:2021-02-01
Contact: Jian Chen E-mail:jchen@zc-hightech.com

摘要/Abstract

摘要： 为建立完善的熔石英元件吸收缺陷检测体系, 有效提升熔石英元件的抗激光损伤阈值, 设计了一套熔石英损伤特性原位测量装置, 包括光热扫描测量与拉曼光谱测量两部分。实验表明, 该装置不仅可以对熔石英样品的定点损伤特性进行测量, 同时可以通过二维光热扫描测出样品的吸收特性和缺陷分布。此外, 通过该装置的显微拉曼光谱测量模块可实现在辐照过程中对缺陷所致拉曼带的原位测量, 获取激光辐照过程熔石英材料改性的信息, 对有效控制和评价熔石英激光损伤特性具有重要意义。

关键词: 激光技术, 缺陷检测, 熔石英, 光热吸收, 拉曼光谱

Abstract: In order to establish a defect detection system of fused quartz and improve laser-induced damage threshold, a device of in situ measuring fused quartz damage characteristics is designed. It consists of two parts, photothermal scanning measurement and Raman spectral measurement. The experimental results show that, the equipment can not only measure fixed point damage characteristics of fused quartz, but also get the absorption characteristics and defect distribution of fused quartz by two-dimensional photothermal scanning. Moreover, the Raman spectral information and material modification information caused by laser irradiation could be obtained in situ through the micro Raman spectrum measurement module of the device, which is of great significance to control and evaluate the laser damage characteristics of fused quartz effectively.

Key words: laser technique, defect inspection, fused quartz, photo-thermal absorption, Raman spectrum

中图分类号:

O433.1

李文彩, 马玉良, 陈坚. 熔石英损伤特性原位测量方法研究[J]. 量子电子学报, 2021, 38(1): 94-98.

LI Wencai, MA Yuliang, CHEN Jian. In situ measurement of damage characteristics of fused quartz[J]. Chinese Journal of Quantum Electronics, 2021, 38(1): 94-98.

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