Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition

Abstract

Abstract:

In order to investigate influence of the substrate temperature and distance on diamond-like carbon (DLC) films in the pulsed laser deposition (PLD), firstly the temperature kept at 200℃ to deposit DLC film when the graphite target located 25.0mm and 30.0mm from substrate respectively, secondly the temperature kept at 400℃ to deposit DLC film when the graphite target located 25.0mm and 30.0mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy (AFM). The experimental result demonstrates that ratio of sp3/sp2 and the density of DLC film would decrease and size and number of graphitic crystallites would increase when the temperature or the distance increased. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC film obviously.

Key words: laser techniques, pulsed laser deposition, diamond-like carbon film, microstructure; topography

CLC Number:

TN249

LUO Le, ZHAO Duliang, CHU Yaqiong, Wang Yi, MA Yue, TAO Ruhua. Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition[J]. J4, 2012, 29(6): 759-763.

References

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Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition

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