关键词: 激光技术, 温度控制, 智能PID, 准分子激光器, 算法

Abstract:

The stability of temperature in the chamber of excimer laser has a great effect on working performance of the excimer especially for the stability of the output energy and the laser’s useful life .So it is very important to keep the chamber temperature constantly. Based on that, a high precision temperature control system of excimer laser was designed, together with its composition and working principle. Meanwhile ,the software and hardware and optimization control algorithm were designed. Experimental results indicate that the designed system has superior control precision which provides a favorable temperature environment for the laser’s operation.

Key words: laser techniques, temperature control, intelligent PID, excimer laser, algorithm