红光波段虚像相位阵列光谱仪研究

doi:10.3969/j.issn.1007-5461.2021.06.006

量子电子学报 ›› 2021, Vol. 38 ›› Issue (6): 788-795.doi: 10.3969/j.issn.1007-5461.2021.06.006

• "激光光谱新技术与应用”专辑(续） • 上一篇下一篇

红光波段虚像相位阵列光谱仪研究

周昊1,2 , 方波1,2 , 杨娜娜1,2 , 赵卫雄1∗ , 王春晖1,3 , 张为俊1,3

1 中国科学院合肥物质科学研究院安徽光学精密机械研究所, 安徽合肥 230031; 2 中国科学技术大学, 安徽合肥 230026; 3 中国科学技术大学环境科学与光电技术学院, 安徽合肥 230026

收稿日期:2021-05-11 修回日期:2021-07-05 出版日期:2021-11-28 发布日期:2021-11-28
通讯作者: E-mail: wxzhao@aiofm.ac.cn E-mail:E-mail: wxzhao@aiofm.ac.cn
作者简介:周昊 ( 1995 - ), 安徽安庆人, 博士生, 主要从事激光光谱技术及应用方面的研究。 E-mail: 1584434328@qq.com
基金资助:
Supported by National Natural Science Foundation of China (国家自然科学基金, 41805104, 41627810, 41875151, 42022051), the Youth Innovation Promotion Association CAS (中国科学院青年创新促进会, Y202089)

Development of virtually imaged phased array spectrometer in red band

ZHOU Hao 1,2 , FANG Bo 1,2 , YANG Nana 1,2 , ZHAO Weixiong 1∗ , WANG Chunhui 1,3 , ZHANG Weijun 1,3

1 Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Hefei 230031, China; 2 University of Science and Technology of China, Hefei 230026, China; 3 School of Environmental Science and Optoelectronic Technology, University of Science and Technology of China, Hefei 230026, China

Received:2021-05-11 Revised:2021-07-05 Published:2021-11-28 Online:2021-11-28

摘要/Abstract

摘要： 利用虚像相位阵列 (VIPA) 的强色散能力发展而来的 VIPA 光谱仪是一种新型的高性能光谱测量装置, 兼具宽光谱覆盖范围、高时间分辨率及高光谱分辨率等优点。基于 60 GHz 自由光谱区 (FSR) 的石英 VIPA, 研制了一台可用于红光波段光谱测量的 VIPA 光谱仪, 并测量了 633 nm 多模激光器的出射光谱。在 100 µs 的时间分辨率下, 获得了单次 3.1 nm 测量谱宽、2.0 pm (1.5 GHz) 的高光谱分辨率, 连续 4 h 运行显示光谱漂移小于 0.50 pm。通过采用衍射光栅扫描装置、更短曝光速度的面阵 CCD 和更大 FSR 的 VIPA , 有望进一步提高光谱仪性能。

关键词: 光谱学, 光谱仪, 虚像相位阵列, 高光谱分辨率

Abstract: VIPA spectrometer, based on the strong dispersion capability of the virtually imaged phased array (VIPA), is a new type of high-performance spectral measurement technology, which has the advantages of wide spectral coverage, high time resolution, and high spectral resolution. Based on a quartz VIPA in 60 GHz free spectral region (FSR), a VIPA spectrometer for spectrum measurement in the red light band is developed, and the output spectrum of a 633 nm multi-mode laser is measured. At a time resolution of 100 µs, the output spectrum with a single measurement of 3.1 nm spectral width and 2.0 pm (1.5 GHz) high spectral resolution is obtained. And the continuous operation for 4 h shows that the spectral drift is less than 0.5 pm. The performance of the spectrometer can be further improved by using diffraction grating scanning device, area CCD with shorter exposure speed, and VIPA with larger FSR.

Key words: spectroscopy, spectrometer, virtually imaged phased array, high spectral resolution

中图分类号:

O439

周昊, 方波, 杨娜娜, 赵卫雄∗, 王春晖, 张为俊, . 红光波段虚像相位阵列光谱仪研究[J]. 量子电子学报, 2021, 38(6): 788-795.

ZHOU Hao , , FANG Bo , , YANG Nana , , ZHAO Weixiong ∗ , WANG Chunhui , , ZHANG Weijun , . Development of virtually imaged phased array spectrometer in red band[J]. Chinese Journal of Quantum Electronics, 2021, 38(6): 788-795.

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红光波段虚像相位阵列光谱仪研究

Development of virtually imaged phased array spectrometer in red band

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