量子电子学报 ›› 2021, Vol. 38 ›› Issue (5): 661-668.doi: 10.3969/j.issn.1007-5461.2021.05.010

• “激光光谱新技术与应用”专辑 • 上一篇    下一篇

基于 EMD 的中红外 TDLAS 检测低浓度 NO 优化方法研究

田 川1, 邹丽昌2, 阮 斌1, 黄 俊1, 邓 瑶2, 阮 真1, 卢志民2;3;4, 姚顺春2;3;4∗   

  1. 1 广州珠江电力有限公司, 广东 广州 511457; 2 华南理工大学电力学院, 广东 广州 510640; 3 广东省能源高效清洁利用重点实验室, 广东 广州 510640; 4 广东省能源高效低污染转化与工程技术研究中心, 广东 广州 510640
  • 收稿日期:2020-12-23 修回日期:2021-03-14 出版日期:2021-09-28 发布日期:2021-09-28
  • 通讯作者: E-mail: epscyao@scut.edu.cn E-mail:epscyao@scut.edu.cn
  • 作者简介:田 川 ( 1969 - ), 湖北恩施人, 硕士, 高级工程师, 主要从事气体传感与优化方面的研究。 E-mail: D201430230306@163.com
  • 基金资助:
    Supported by National Key Research and Development Program of China (国家重点研发计划, 2019YFE0109700), Key Program of Guangzhou Science and Technology Plan (广州市科技计划重点项目, 201904020017)

Optimization method research on low NO concentration detection by mid-infrared TDLAS based on EMD

TIAN Chuan1, ZOU Lichang2, RUAN Bin1, Huang Jun1, DENG Yao2, RUAN Zhen1, LU Zhimin2;3;4, YAO Shunchun2;3;4∗   

  1. 1 Guangzhou Zhujiang Electric Power Co., Ltd., Guangzhou 511457, China; 2 School of Electric Power, South China University of Technology, Guangzhou 510640, China; 3 Guangdong Province Key Laboratory of Efficient and Clean Energy Utilization, Guangzhou 510640, China; 4 Guangdong Province Engineering Research Center of High Efficiency and Low Pollution Energy Conversion, Guangzhou 510640, China
  • Received:2020-12-23 Revised:2021-03-14 Published:2021-09-28 Online:2021-09-28

摘要: 为了实现低浓度 NO 的高灵敏检测, 选用中心波长位于 5.18 µm 的量子级联激光器 (QCL) 和光程为 25 cm 的单光程气体池, 设计并搭建了 NO 的可调谐二极管激光吸收光谱 (TDLAS) 检测系统。为降低系统噪 声的影响, 以提高 NO 的检测灵敏度, 并降低检测下限, 研究了对波长调制光谱 (WMS) 的二次谐波 (2 f ) 信号 进行滤波降噪的经验模态分解 (EMD) 算法, 识别并去除被检测信号中隐藏的高频噪声和光学条纹, 并与其 他几种常用的滤波方法对 2 f 信号的降噪效果进行了比较。在此基础上开展了NO连续监测实验, 采用 Allan 方差分析比较了EMD滤波降噪前后系统的稳定性和检测下限。研究结果表明: EMD 降噪后检测系统的响应 线性度达到 0.999; 体积浓度为 30 × 10−6 的 NO 检测浓度波动范围由 29:424 × 10−6 ∼ 33:184 × 10−6 缩小至 29:585 × 10−6 ∼ 31:273 × 10−6, 相对误差范围由 0.17%∼10.61% 降低至 0 ∼ 4:24%; 在 1.5 s 的平均时间内, 系统检 测下限由 653 × 10−9 降至 442 × 10−9 ; 在最佳平均时间下, 系统检测下限由 272:7 × 10−9 降至 185:5 × 10−9 , 证明 了此方法可以有效提高检测系统的 NO 检测准确度、灵敏度, 进一步降低了检测下限。

关键词: 光谱学, 滤波降噪, 经验模态分解, 低浓度 NO, Allan 方差

Abstract: In order to realize high sensitivity detection of low concentration NO, a tunable diode laser absorption spectroscopy (TDLAS) detection system is designed by using a quantum cascade laser (QCL) with a central wavelength of 5.18 µm and a single optical path gas with an optical path of 25 cm. In order to reduce the influence of system noise so as to improve the sensitivity of NO detection and reduce the detection limit, the empirical mode decomposition (EMD) algorithm is used to filter the second harmonic (2 f ) signal of wavelength modulation spectroscopy (WMS) to identify and remove the high-frequency noise and optical fringes hidden in the detected signal, and then the noise reduction effect of (2f) signal of EMD algorithm is compared with that of the other common filtering methods. Based on this, NO continuous monitoring experiment is carried out, and Allan variance analysis is used to compare the stability and detection limit of the system before and after EMD filtering. The results show that the response linearity of the detection system reaches 0.999 after EMD noise reduction. The fluctuation range of NO detection concentration at 30 × 10-6 is reduced from 29:424 × 10-6 ∼ 33:184 × 10-6 to 29:585 × 10-6 ∼ 31:273 × 10-6, and the relative error range is reduced from 0:17% ∼ 10:61% to 0∼4.24%. In the average time of 1.5 s, the detection limit of the system is reduced from 653 × 10-9 to 442 × 10-9. Under the optimal average time, the detection limit of the system is reduced from 272:7 × 10-9 to 185:5 × 10-9, which proves that this method can effectively improve the detection accuracy and flexibility of the detection system and further reduce the detection limit.

Key words: spectroscopy, filtering and noise reduction, empirical mode decomposition, low NO concentration, Allan variance

中图分类号: