脉冲激光沉积法沉积类金刚石薄膜的实验研究

J4 ›› 2012, Vol. 29 ›› Issue (6): 759-763.

脉冲激光沉积法沉积类金刚石薄膜的实验研究

罗乐¹,赵读亮¹,储雅琼¹,汪毅¹,马跃²,陶汝华²

1 合肥工业大学电子科学与应用物理学院，安徽合肥 230009；
2 中国科学院安徽光学精密机械研究所，安徽合肥 230031

收稿日期:2012-02-07 修回日期:2012-05-28 出版日期:2012-11-28 发布日期:2014-03-20
通讯作者: 罗乐（1963—）副教授，博士，主要从事激光技术和功能薄膜材料的研究。 E-mail:luolehfut@yahoo.cn
基金资助:
中科院百人计划项目

Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition

LUO Le¹, ZHAO Duliang¹, CHU Yaqiong¹, Wang Yi¹, MA Yue², TAO Ruhua²

1 Electronics and Applied Physics School, Hefei University of Technology, Hefei 230009, China;
2 Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Science, Hefei 230031, China

Received:2012-02-07 Revised:2012-05-28 Published:2012-11-28 Online:2014-03-20

摘要/Abstract

摘要：

为了研究脉冲激光沉积法中衬底温度和距离对类金刚石薄膜的影响，首先温度保持在200℃，靶和衬底间的距离分别取25.0mm和30.0mm来沉积类金刚石膜。其次温度保持在400℃，距离分别取25.0mm和30.0mm来沉积类金刚石膜。用Raman光谱仪对薄膜的微观结构进行检测，用原子力显微镜对薄膜的表面形貌进行检测。实验结果表明：距离增加或者温度升高都会导致类金刚石薄膜的密度和sp3/ sp2的比值减小，薄膜中石墨晶粒的数量增多和体积增大。近距离时温度的变化和低温时距离的变化对薄膜微观结构产生的影响更明显。距离和温度的变化对类金刚石薄膜的表面形貌也产生显著的影响。

关键词: 激光技术, 脉冲激光沉积法, 类金刚石薄膜, 微观结构, 表面形貌

Abstract:

In order to investigate influence of the substrate temperature and distance on diamond-like carbon (DLC) films in the pulsed laser deposition (PLD), firstly the temperature kept at 200℃ to deposit DLC film when the graphite target located 25.0mm and 30.0mm from substrate respectively, secondly the temperature kept at 400℃ to deposit DLC film when the graphite target located 25.0mm and 30.0mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy (AFM). The experimental result demonstrates that ratio of sp3/sp2 and the density of DLC film would decrease and size and number of graphitic crystallites would increase when the temperature or the distance increased. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC film obviously.

Key words: laser techniques, pulsed laser deposition, diamond-like carbon film, microstructure; topography

中图分类号:

TN249

罗乐赵读亮储雅琼汪毅方晓东马跃陶汝华. 脉冲激光沉积法沉积类金刚石薄膜的实验研究[J]. J4, 2012, 29(6): 759-763.

LUO Le, ZHAO Duliang, CHU Yaqiong, Wang Yi, MA Yue, TAO Ruhua. Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition[J]. J4, 2012, 29(6): 759-763.

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