大能量高功率准分子激光的应用及关键技术

J4 ›› 2013, Vol. 30 ›› Issue (6): 696-702.

大能量高功率准分子激光的应用及关键技术

赵家敏, 游利兵, 余吟山, 方晓东

中国科学院安徽光学精密机械研究所激光技术中心, 安徽合肥 230031

收稿日期:2013-01-09 修回日期:2013-03-07 出版日期:2013-11-28 发布日期:2013-11-13
作者简介:赵家敏( 1985 - ),博士生,主要从事高压脉冲及准分子激光技术。
基金资助:
国家自然科学基金资助项目(61205138)

Application and key technology of high energy and high power excimer laser

ZHAO Jia-min, YOU Li-bing, YU Yin-shan, FANG Xiao-dong

Center of Applied Laser Technology, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

Received:2013-01-09 Revised:2013-03-07 Published:2013-11-28 Online:2013-11-13

摘要/Abstract

摘要：

实用型大能量高功率准分子激光器广泛地应用于材料的加工及表面处理,介绍了其在液晶平板显示行业、太阳能光伏行业、半导体行业及汽车制造业的应用。分析了大能量高功率准分子激光器的关键技术,如大面积均匀放电技术,预电离技术,高压快脉冲激励技术以及为了得到更大的脉冲能量及功率输出而采用的双腔同步技术。

关键词: 激光技术, 准分子激, 大能量, 高功率, 磁脉冲压缩, 激光退火

Abstract:

The practical large energy and high power excimer laser are widely used in materials processing and surface treatment. The applications of excimer lasers in the flat panel display industry, solar photovoltaic industry, semiconductor industry and automobile manufacturing industry were introduced. The key technologies employed to improve the performance of excimer lasers were analyzed, including the technology of large area uniform
discharge, pre-ionization, and high voltage pulse technology. The dual-chamber synchronization technology was used to obtain higher energy and power.

Key words: laser techniques, excimer laser, large energy, high power, magnetic pulse compression, laser annealing

中图分类号:

TN248.2

赵家敏, 游利兵, 余吟山, 方晓东. 大能量高功率准分子激光的应用及关键技术[J]. J4, 2013, 30(6): 696-702.

ZHAO Jia-min, YOU Li-bing, YU Yin-shan, FANG Xiao-dong. Application and key technology of high energy and high power excimer laser[J]. J4, 2013, 30(6): 696-702.

参考文献

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