离轴石英谐振光声光谱CO2传感研究

摘要/Abstract

摘要： 二氧化碳（CO2）不仅是一种重要的温室气体，也是具有危害性的窒息性气体，因此发展小型化、高灵敏度的CO2浓度传感对无人机载、探空球等探测大气CO2以及在空间封闭环境的CO2浓度监测等领域具有较大的应用需求。开展了基于2.0 μm可调谐半导体激光器的CO2传感研究，搭建了CO2探测实验系统。系统以4989.97 cm-1处的CO2吸收谱线为研究对象，采用微小型的离轴石英音叉增强型光声光谱新技术对CO2气体传感进行研究。通过优化调制频率和调制振幅等参数，确定了CO2传感系统的最佳参数。在最优实验参数条件下对CO2气体进行探测，获得系统的最小探测灵敏度为142 μL/L，最小归一化等效噪声吸收系数为3.37×10-8 cm-1W/HZ1/2。

关键词: 光谱学, 灵敏度, 石英音叉光声光谱, 二氧化碳

Abstract: Carbon dioxide (CO2) is not only an important greenhouse gas, but also a harmful asphyxiating gas. Therefore, the development of miniaturized, high-sensitivity concentration sensing of CO2 has great application requirements for detecting atmospheric CO2 by unmanned aerial vehicles, sounding balloons, and monitoring CO2 concentration in space-enclosed environments. A research system based on 2.0 μm tunable semiconductor laser was established for the detection of CO2 concentration. The CO2 absorption line at 4989.97 cm-1 was chosen as the target line, and the CO2 gas sensing was carried out using micro-miniature off-beam quartz enhanced photoacoustic spectroscopy. By detecting the photoacoustic signals of a certain concentration of CO2 at different modulation frequencies and modulation amplitudes, the optimal modulation frequency and modulation amplitude of the system were obtained. The CO2 gas is detected under the optimized parameters, a detection limit of 142 μL/L is achieved, which corresponds to a normalized noise equivalent absorption coefficient of 3.37×10-8 cm-1W/HZ1/2.

Key words: spectroscopy, sensitivity, quartz enhanced photoacoustic spectroscopy, carbon dioxide

周彧1,2,刘锟1，高晓明1 . 离轴石英谐振光声光谱CO2传感研究[J]. 量子电子学报.

ZHOU Yu1,2, LIU Kun1, GAO Xiaoming1. Detection of Carbon Dioxide based Off-beam Quartz Enhanced Photoacoustic Spectroscopy[J]. Chinese Journal of Quantum Electronics.

参考文献

[1] Bozoki Z, Pogany A, Szabo G. Photoacoustic instruments for practical applications: present, potentials, and future challenges [J]. Applied Spectroscopy Reviews, 2011, 46(1): 1-37. [2] Meyer P L, Sigrist M W. Atmospheric pollution monitoring using CO2 – laser photoacoustic spectroscopy and other techniques [J]. Review of Scientific Instruments, 1990, 61(7): 1779-1807. [3] Narasimhan L R, Goodman W, Patel C. Correlation of breath ammonia with blood urea nitrogen and creatinine during hemodialysis [J]. Proceedings of the National Academy of Sciences of the United States of America, 2001, 98(8): 4617-4621. [4] 赵俊娟，赵湛，杜利东，等. 球形光声腔中二氧化碳的检测 [J]. 传感技术学报，2012,25（3）：289-292. Zhao Junjuan, Zhao Zhan, Du Lidong, et al. Detection of CO2 in the spherical photoacoustic cell [J]. Chinese Journal of Sensors and Actuators (传感技术学报), 2012, 25(3):289-292 (in Chinese) [5] 刘强，王贵师，刘锟，等. 基于光声光谱技术的大气气溶胶吸收系数测量 [J]. 红外与激光工程，2014,43（9）：3010-3014. Liu Qiang, Wang Guishi, Liu Kun, et al. Measurements of atmospheric aerosol optical absorption coefficients using photoacoustic spectrometer [J]. Infrared and Laser Engineering (红外与激光工程), 2014，43(9): 3010-3014 (in Chinese). [6] 查申龙，刘锟，谈图，等. 光声光谱技术在多组分气体浓度探测中的应用 [J]. 光子学报，2017,46（6）：0612002. Zha Shenlong, Liu Kun, Tan Tu, et al. Application of photoacoustic spectroscopy in multi-component gas concentration detection [J]. Acta Photonica Sinica (光子学报), 2017, 46(6): 0612002 (in Chinese). [7] Liu Kun, Yi Hongming, Kosterev A, et al. Trace gas detection based on off-beam quartz enhanced photoacoustic spectroscopy: optimization and performance evaluation [J]. Review of Scientific Instruments, 2010, 81(10): 103103. [8] 周彧，曹渊，朱公栋，等. 基于7.6μm量子级联激光的光声光谱探测N2O气体 [J]. 物理学报，2018,678（8）：084201. Zhou Yu, Cao Yuan, Liu Kun, et al. Detection of nitrous oxide by resonant photoacoustic spectroscopy based on mid infrared quantum cascade laser [J]. Acta Physica Sinica (物理学报), 2018，67(8): 084201 (in Chinese). [9] 查申龙，刘锟，朱公栋，等. 基于共振型高灵敏度光声光谱技术探测痕量乙炔气体浓度 [J]. 光谱学与光谱分析，2017,37（9）：2673-2678. Zha Shenlong, Liu Kun, Zhu Gongdong, et al. Acetylene detection based on resonant high sensitive photoacoustic spectroscopy [J]. Spectroscopy and Spectral Analysis (光谱学与光谱分析), 2017, 37(9): 2673-2678 (in Chinese). [10] 陈颖，高光珍，蔡廷栋. 基于光声光谱的乙烯探测技术 [J]. 中国激光，2017,44（5）：0511001. Chen Ying, Gao Guangzhen, Cai Tingdong. Detection technique of ethylene based on photoacoustic spectroscopy [J]. Chinese Journal of Lasers (中国激光), 2017, 44(5): 0511001 (in Chinese). [11] Laurila T, Cattaneo H, Koskinen V, et al. Diode laser-based photoacoustic spectroscopy with interferometrically-enhanced cantilever detection. Optics Express, 2005, 13(7): 2453 - 2458 [12] Kosterev A A, Bakhirkin Y A, Curl R F, et al. Quartz-enhanced photoacoustic spectroscopy [J]. Optics Letters, 2002, 27(1): 1902-1904. [13] Liu Kun, Mei Jiaoxu, Zhang Weijun, et al. Multi-resonator photoacoustic spectroscopy [J]. Sensors and Actuators B: Chemical, 2017, 251: 632-636. [14] Yi Hongming, Liu Kun, Chen Weidong, et al. Application of broadband blue laser diode to trace NO2 detection using off-beam quartz-enhanced photoacoustic spectroscopy [J]. Optics Letters, 2011, 36(4): 481-483. [15] 王贵师，易红明，蔡廷栋，等. 基于石英音叉增强型光谱技术(QEPAS)的实时探测系统研究 [J]. 物理学报，2012,61（12）：120701. Wang Guishi, Yi Hongming, Cai Tingdong, et al. Research on the real-time measurement system based on QEPAS [J]. Acta Physica Sinica (物理学报), 2012, 61(12): 120701 (in Chinese). [16] Yi Hongming, Chen Weidong, Vicet A, et al. T-shape microresonator-based quartz-enhanced photoacoustic spectroscopy for ambient methane monitoring using 3.38-μm antimonide-distributed feedback laser diode [J]. Applied Physics B, 2014, 116(2): 423-428. [17] 马欲飞，何应，于欣，等. 基于石英增强光声光谱的HCl痕量气体高灵敏度探测研究 [J]. 光谱学与光谱分析，2017,37（4）：1033-1036. Ma Yufei, He Ying, Yu Xin, et al. Research on high sensitive detection of HCl trace gas based on QEPAS technology [J]. Spectroscopy and Spectral Analysis (光谱学与光谱分析), 2017, 37(4): 1033-1036 (in Chinese). [18] 胡立兵，刘锟，王贵师，等. 基于2.33μm可调谐激光的石英音叉增强型光声光谱测量CO研究 [J]. 激光与光电子学进展，2015,52:053002. Hu Libing, Liu Kun, Wang Guishi, et al. Research on detecting CO with quartz enhanced photoacoustic spectroscopy based on 2.33μm distributed feedback laser [J]. Laser and Optoelectronics progress (激光与光电子学进展), 2015, 52: 053002 (in Chinese). [19] Ma Y, Lewicki R, Razeghi M, et al. QEPAS based ppb-level detection of CO and N2O using a high power CW DFB-QCL [J]. Optics. Express, 2013, 21(1): 1008-1019. [20] 谈图，刘锟，王贵师，等. 基于中红外QCL激光和新型多通池高灵敏度测量CO和N2O的研究 [J]. 2015, 35（2）：0230005. Tan Tu, Liu Kun, Wang Guishi, et al. Research on high sensitivity measurement of N2O and CO based on MIR-QCL and novel compact multi-pass gas cell [J]. Acta. Optica. Sinica (光学学报), 2015, 35(2): 0230005 (in Chinese). [21] Nagi A, Persijn S T, Lindsay I D, et al. Continuous wave optical parametric oscillator for quartz-enhanced photoacoustic trace gas sensing [J]. Applied Physics B, 2007, 89(1): 123-128. [22] Borri S, Patimisco P, Sampaolo A, et al. Terahertz quartz enhanced photo-acoustic sensor [J]. Applied Physics Letters, 2013, 103(2): 021105. [23] Kosterev A A, Dong Lei, Thomazy D, et al. QEPAS for chemical analysis of multi-component gas mixtures [J]. Applied Physics B, 2010, 101: 649–659 [24] Kosterev A A, Tittel F K, Serebryakov D V, et al. Applications of quartz tuning forks in spectroscopic gas sensing [J]. Applied Spectroscopy Reviews, 2005, 76(4): 043105. [25] Liu Kun, Gao Xiaoming, Yi Hongming, et al. Off-beam quartz-enhanced photoacoustic spectroscopy [J]. Optics Letters, 2009, 34(10): 1594-1596. [26] Yi Hongming, Chen Weidong, Sun Shanwen, et al. T-shape microresonator-based high sensitivity quartz-enhanced photoacoustic spectroscopy sensor [J].Optics Express, 2012, 20(8): 9187-9196. [27] 刘小利，武红鹏，邵杰，等. 利用石英增强光声光谱技术在2.0μm处实现高灵敏CO2检测的实验研究 [J]. 光谱学与光谱分析，2015,35（8）：2078-2082. Liu Xiaoli, Wu Hongpeng, Shao Jie, et al. High-sensitive carbon dioxide detection using quartz-enhanced photoacoustic spectroscopy with a 2.0 μm distribute feedback laser [J]. Spectroscopy and Spectra Analysis (光谱学与光谱分析), 2015, 35(8): 2078-2082 (in Chinese).